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Numerical Parameterization of Chemical-Vapor-Deposited (CVD) Single-Crystal Diamond for Device Simulation and Analysis

机译:化学气相沉积(CVD)单晶金刚石的数值参数化,用于设备仿真和分析

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摘要

High-quality electronic-grade intrinsic chemical-vapor-deposited (CVD) single-crystal diamond layers having exceptionally high carrier mobilities have been reported by Isberg et al. This makes the realization of novel electronic devices in diamond, particularly for high-voltage and high-temperature applications, a viable proposition. As such, material models which can capture the particular features of diamond as a semiconductor are required to analyze, optimize, and quantitatively design new devices. For example, the incomplete ionization of boron in diamond and the transition to metallic conduction in heavily boron-doped layers require accurate carrier freeze-out models to be included in the simulation of diamond devices. Models describing these phenomena are proposed in this paper and include numerical approximation of intrinsic diamond which is necessary to formulate doping- and temperature-dependent mobility models. They enable a concise numerical description of single-crystal diamond which agrees with data obtained from material characterization. The models are verified by application to new Schottky m-i-p(+) diode structures in diamond. Simulated forward characteristics show excellent correlation with experimental measurements. In spite of the lack of impact ionization data for single-crystal diamond, approximation of avalanche coefficient parameters from other wide-bandgap semiconductors has also enabled the reverse blocking characteristics of diamond diodes to be simulated. Acceptable agreement with breakdown voltage from experimental devices made with presently available single-crystal CVD diamond is obtained.
机译:Isberg等人已经报道了具有极高载流子迁移率的高质量电子级本征化学气相沉积(CVD)单晶金刚石层。这使得在金刚石中实现新颖的电子设备(尤其是在高压和高温应用中)成为可能。因此,需要能够捕捉钻石作为半导体的特定特征的材料模型来分析,优化和定量设计新设备。例如,金刚石中硼的不完全电离和重硼掺杂层中金属导电的过渡需要精确的载流子冻结模型纳入金刚石器件的仿真中。本文提出了描述这些现象的模型,其中包括固有金刚石的数值逼近,这对于制定掺杂和温度相关的迁移率模型是必不可少的。它们使单晶金刚石的数字描述更为简洁,这与从材料表征获得的数据相吻合。该模型已通过应用于金刚石中的新型肖特基m-i-p(+)二极管结构进行了验证。模拟的前向特性与实验测量值显示出极好的相关性。尽管缺少单晶金刚石的碰撞电离数据,但其他宽带隙半导体的雪崩系数参数的近似值也可以模拟金刚石二极管的反向阻断特性。从由目前可用的单晶CVD金刚石制成的实验装置中获得击穿电压的可接受协议。

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